ISO 03882-2024.docx

5>×SOInternationa1.StandardISo3882Fourthedition2024-01Meta1.1.icandotherinorganiccoatingsReviewofmethodsofmeasurementofthicknessRevtementsmta1.1.iquesetautresrevtementsinorganiquesRevuedesmethodesdemesuragedepaisseurReferencenumberISO38822024(en)COPYRIGHTPROTECTEDDOCUMENT©ISO2024WintG<hcdBdHUWwdotherwiseianSit111.CrW4wErtiwnbxtt11mi<k)hrtRd11kHimhwfrpn911tnmcnpyip<?IHdiCntienma)>theinternetoranintranet,withoutpriorwrittenpermission.PermissiononberequestedfromeitherISOatthebe1.oworISOsmemberbodyinthecountryoftherequester.b,Vyfrfiandonnet8CH-1214VcmicrrGcncvaPhoae:*41227490111聊独te:薪括嬴OQrgPub1.ishedinSwitzer1.andContentsPagCForeWorditroductionv2 SOPe13 Normativereferences14 Termsanddefinitions15 Overview1Nondestructivemethods25.1 Sp1.itbeammicroscope(1.ightsection)method,ISO2128.25.2 MagnetiCmethods,ISO2178andISO236125.8 KddycMnme<h(iBetfiOd,2Sftad9SO2196826 5.5Betabackscattermethod.ISO35433Destructivemethods46.1 Microscopica1.(optica1.)method,ISO146346.2 Fizeaumu1.tip1.e-beaminterferometrymethod,ISO386846.4 R1136tomgt11ce1.ectronmethoffiii4fi811jH1.hod,ISO922046.5 Disso1.utionmethods46.5.1 Cou1.ometricmethod,ISO2177I时：3Gravimetric(ana腑由卅Q由旅Weth(KI淞FiqIOII1.5AnnexA(informative)Typica1.measuringapp1.icationandrange6Bib1.iography.9ForewordISO(theInternationa1.OrganizationforStandardization)isaWOHdwidefederationofnationa1.standardsIK佃iest触UimatKbnnittid诩月配Ina1.ribefPrbP却刖卬区Indtiona1.StauBimdiB-MhiobI1.ytechafrAiciennthtoaghhasbeenestab1.ishedhastherighttoberepresentedonthatcommittee.Internationa1.organizations,governmenta1.andnon-governmenta1.,in1.iaisonwithISO,a1.sotakepartinthework.ISOco1.1.aboratesc1.ose1.ywiththeInternationa1.E1.ectrotechnica1.Commission(IEC)ona1.1.mattersOfe1.ectrotechnica1.standardization.Theproceduresusedtodeve1.opthisdocumentandthoseintendedforitsfurthermaintenancearcdescribedintheISO/IECDirectives,Part1.Inparticu1.ar,thedifferentapprova1.criterianeededforthedifferenttypesISOdrawsattentiontothepossibi1.itythattheimp1.ementationofthisdocumentmayinvo1.vetheuseof（八）陈榭泡PeCttake.M?e温邙解tion南品优eM嗨脚硒般M晓%CU楹蝌胭biR%f1盛胭MiMdPatentpatents)whichmayberequiredtoimp1.ementthisdocument.However,imp1.ementersarecautionedthatthismaynotrepresentthe1.atestinformation,whichmaybeobtainedfromthepatentdatabaseavai1.ab1.eatWWWmeMirgpm1.3NsISOsha1.1.notbehe1.dresponsib1.eforidentifyinganyora1.1.suchpatentrights.Anytradenameusedinthisdocumentisinformationgivenfortheconvenienceofusersanddoesnotconstituteanendorsement.Organization(VVrTO)princip1.esintheTechnica1.BarrierstoTrade(TBT),seewww.iso.org/iso/forcword.htm1.1.觎微硼斑斛STatni¾u现儡g豳mmFm那睇a幽陶嬲睡册nMeS/历设阳也m胳te三)嬲6型a1.1.oys,inaccordancewiththeAgreementontechnica1.cooperationbetweenISOandCEN(ViennaAgreement).Thisrevised.fourtheditioncance1.sandrep1.acesthethirdedition(ISO3882:2003),whichhasbeentechnica1.1.yThemainchangesareasfo1.1.ows：editoria1.revisions；restructuringofthedocument;newsubc1.ause6.5.1.2fortheSTEPmethod：reviewOfmeasurementuncertainties;PhaSuianSitiVeeddycurrent,asdescribedinISO21968raddedtomeasurementmethodsandTab1.esA.1.andA.2.AimPIetef由dtingk帕HOnah(XAnjhhKHindirthontdtw½4iJXo*ynHHHheFtttem1.'snationa1.standardsbody.AIntroductionThisdocumentsummarizesthevariousmethodsusedforthemeasurementofcoatingthicknessandinstrumenta1.methodssuitab1.eforthicknessmeasurements.Fora1.1.inst11menta1.methods,manufacturers/instructionscontainusefu1.informationonthecorrecthand1.ingoftheinstruments.SH够Kd瞭¾W8¾hGWf"融点域的6ftgf1.Wd跳蚓;(田IW;ga1.ftws,XMtWi1fri1.frycanbeusedtomeasurethethicknessofachromiumcoating,thicknessesof20mormorecannotbemeasuredwithsufficientprecision.Simi1.ar1.y,whi1.emagneticmethodscanbeUSCdtomeasurethethicknessB1.ea我用68?+K1.想+KtF8明黯相,sfianyth4WneticinstrumentsdonothavethesensitivitytoWherearefereemethodisrequired,theappropriatecoatingspecificationcancontainusefu1.informationonthepreferredmethod.Meta1.1.icandotherinorganiccoatingsReviewofmethodsofmeasurementofthickness1 ScopebothSPednCd.Internationa1.subs1.rates(seeandexc1.udescertaintests1.tthadimitedusedtestsa1.readyapp1.ications.2 Normativereferencesrequirementsofthisreferenceddocumentreferences,on1.yamendments)app1.ies.Forundatedreferences,thickness3 TermsanddefinitionsISOand)ECmaintaintermino1.og>rdatabasesforuseinstandardizationatthefo1.1.owingaddresses:E1.ectropedia:avai1.ab1.ePedia1.gi¾Tab1.e-4summarizesthemethodsofmeasuringmeasuringcoatingthicknessinthisdocumentSp1.itbeammicroscope(1.ightsection)ISO2128Microscopica1.(optica1.)ISO1463IrightsreservedCanbcnondestructivThisdocumentreviewsmethodsformeasuringofnw)1.1.icandotherinorganiccoatingsonorbemeta1.1.icandnon-meta1.1.icStandardsTab1.es1,A.1.andA.2).isaretoforspecia1.specified,einsomeThefo1.1.owingdocumentsarereferredtointhetextinsuchawaythatsomeora1.1.oftheircontentconstitutesapp1.ications.the1.atesteditionofthcdocument.Fordated(inc1.udinganytheeditioncitedISO2064,Meta1.1.icando1.herorganiccoatings-DefinitionsandconventionsconcerningthemeasurementofForthepurposesofthisdoment,thetermsanddefinitionsgiveninISO2064app1.y.ISOOn1.inebrowsingp1.atform：avai1.ab1.eathttps:WWW.iso.org/ObP4IECOverviewoTab1.e1MethodsofcoatingthicknessthatarediscussedNon*destructiveDestructive024gravimetricana1.ytica1.method5Non-destructivemethods5.1Sp1.itbeammicroscope(1.ightsection)method,ISO2128thicknesstransparentandtrans1.ucentcoatings,ofinparticu1.aranodicbeamisreectedona1.uminium.surface1.ightthicknessmc1.hodcoatingandusedWheremcasuredbymeansrecctedscrewcoating-meta1.ca1.ibratedFormeasuringdestructive.Thcopaquccoatings,theSurfacearcaIhethecoatingandremoved;Hwta1.app1.ication,verymcthod(grcatersuitab1.e1.OOhardanodicorcoatingsorforcoatingsthatarccoatingsonheavi1.yshot-b1.astedmethodcannotbeused.Themeasurementuncertaintyot2178methodISOsua1.1.y1.essthan10%ofthethickness.Instmmentsinf1.uencedbypresencemeasurecoatingmagnetic2361),attractionre1.uctanceaofmagneticuxbasisinstrumentscurvature,methodsc1.ean1.iness,sensitivetoroughnessandthicknessandpropertiesmeta1.andtestthiseffectisdeterminedbyca1.ibrationatthetestspecimen.greater.measurementuncertaintyofthemethodis1.essthan10%ofthethicknessor1,5m,whicheveristhe5.3Eddycurrentmethods,ISO2360andISO21968Conductivecoatingsandnon-magneticThemethodofSing1.eprimari1.ymeta1.measuringnon-conductors.of1.fnon-coatingsonisnon-conductivebasephase-sensitiveeddyamp1.itude-sensitivemethod.Furthermore,meta1.1.icThemethodisidea1.suiteddeterminationmeasurements.ForThisequipment,origina1.1.ydesignedforthemeasurementofsurfaceroughness,isusedformeasuringtheautocata1.yticmeasurementscoatings,a1.uminiummethodbeamofprojectedontothesurfaceang1.e45o.PartoftheoxidecoatingsfromtheAofthecoatingandtherestpenetratestheCo0g*adEHQfR1.deiKkmthecoating-meta1.substrateinterface.Thedistancethatseparatesthetwoimagesobservedintheeyepieceofthemicroscopeisproportiona1.tothegraticu1.e.Thcofbecanbesufficient1.ightisofaVernierfromthetha1.contro1.ssubstrateinterfacetogiveadearimageinthemicroscope.Fortransparentortrans1.ucentcoatings,suchasanodicoxidefi1.ms,thismethodisnon-destructive.themethodthethicknessofstepbetweenasma1.1.ofofisthebasisinthisproducesdef1.ectionofthe1.ightbeamthatgivesanabso1.utemeasureofthecoatingthickness.Thethickisnotthanformthick)rough.Itissuitab1.eforverythin(1.essthan2mthick),surfaces.Othermethods,suchaseddycurrent(seeISO2360),interferencemicroscope(seeISO3868)andmicroscopica1.(secISO1463)rcanbeapp1.icab1.eforthicknessmeasurementwherethesp1.itbeammicroscopeThemethodisbestsuitedtosma1.1.partsbecauseoftheeasewithwhichtheycanbesetuponthemicroscopestage.5.2Magneticmethods,ISOtheandis2361thebetweenandthepathmeta1.rasforthesemethodsoftheeitherthc(seeISOpassingthroughthecoatingandthebasismeta1.(seeISO2178).A1.1.specimen,surfaceusingmagneticsurfacearesurfacethemagneticconditionofthebasisoftheofthecoating.Additiona1.1.y,differentmateria1.scan1.ookthesamebuthavedifferentpermeabi1.ity,r.Usua1.1.y,Thesemethodsare1.imitedinpracticetonon-magneticcoatingsonamagneticsubstrate(seeISO2178)andtoe1.ectrop1.atednicke1.coatingsonamagneticornon-magneticsubstrate(seeISO2361).TheISO2360describesanamp1.itude-sensitivemethodandisbasedondifTerencesine1.ectrica1.conductivitybetweenonsubstrates.meta1.sandisused1.ayerforcoatingsonthethicknessthismethodisusedformeasuringthicknessesOfmeta1.1.iccoatingsonmeta1.1.icsubstrates,greatcareisnecessaryifacceptab1.eresu1.tsaretobeobtained.Inthe1.attercase,thephase-sensitivemethodasdescribedinISO21968moresuitab1.e.Themateria1.sthecurrentmethoda1.somoresuitab1.eforwithincertain1.imitsitcandea1.withnon-magneticmeta1.1.iccoatingsonmagneticbasemateria1.sandwithmagneticcoatingsonnon-conductiveorconductivebasemateria1.s.itsa1.1.oysandiswe1.1.forrapidforusefie1.dofanodiccoatingthicknessnicke1.thisandContenterraticmeasurementsduetovariationsinconductivityofthecoatingswithchangesinphosphorous5.4thegreater.spectrometricmethod,ISO3497meta1.1.iccoatings,CnnssionprovidedabsorptionX-raySpectrometryunifonndeterminingthedirect1.yproportiona1.toemittcdaremadecoatingirradiatefixedsubstrateandattcnuatedsurfac,andcatingintensitymeasured.corre1.ationradiationneededtoensuretraceabi1.ityandtoadjustinsomecasestheca1.cu1.atedcharacteristicwhenconstituentsofthecoatingarepresentinthebasismeta1.,andviceversa;positionofacoatingvariesfromthatoftheca1.ibrationstandard.uncertainty.detectorHoweverrinstrumentsworkingdistancesevacuatedco1.1.imatorswe)1.instrumentsKavingdetermineuncertainty,dueca1.ibrationdistributionofphosphorus1.ayersOfSameconditionsasaffectsthemeasurementInsta1.mentsCommercia1.1.ymeasuringthethicknessofacoatingwithanuncertaintyof1.essthan10%ofthe5.5Betabackscattermethod,ISO3543va1.ues,backscatteredbackscatterspecimen.ofTheIntensityandthatbackscatteredmeta1.raysmeasurementison1.ytomeasured.massmeasuredintensitycoating.betaraysthatspecimenbackscatteredbydcnsityrspccimenintcnsityusedthicknessbeingafunctionforbothcoatingandmateria1.coatings,theminimumandmaximummeasurab1.ecoatingcanbeincrcased.usingthismethod.Dependingonthemeasuringtime,theprecisionofthemeasuringva1.ues©ISO2024-A1.1.rightsreservedgivesThemeasurementuncertaintyofthemethodisusua1.1.y1.essthan10%ofthethicknessor0.5rn.whicheverisX-rayThismethoduseswhich,andthatthetestspecimenisofdensity,ismassperunitareaofthethickness.Inprincip1.e,themethodcana1.sodeterminethecompositionofana1.1.oycoating.Withinitsphysica1.1.imitations,itcana1.soana1.ysesuperimposedcoatings.X-raysbytheorbyatheofthecoatedbythetheoftheAsecondaryexist-betweentheintensityoftheX-raysandthecoa1.ingthickness.Thisiseitherestab1.ishedusingca1.ibrationstandardsorca1.cu1.atedbytheso-ca1.1.edfundamenta1.parametermethodandca1.ibrationstandardsareon1.yThismethod,saccuracyisreduced:whenmorethantwocoa1.ingsaresuperimposed;Themethodisnotapp1.icab1.eaboveacertainthicknessthatdependsontheatomicnumbersanddensitiesofthemateria1.sinvo1.ved.I1.a1.soneedsaminimummassperareatode1.iverresu1.tswithacceptab1.y1.owForautocata1.yticnicke1.coatings,thismethodison1.yrecommendedfordepositsintheas-p1.atedcondition.Thephosphoruscontentofthecoatingshou1.dbeknowninordertoenab1.eca1.cu1.ationofthethicknessofthedeposit,andworkingwithshortwithandIargechamberrorascapi1.1.aryoptics,cananSDIthephosphorouscontentandmeasurethethicknessofthecoatingintwoconsecutivemeasurements,whichruninpracticequasiasonemeasurement,usingdifferentacce1.erationvo1.tagesforbothtasks.Asthematrixeffectthethestandardssha1.1.bemadeinunderthethecoatinga1.sothoseoftheproductionprocess.thicknessarccapab1.eofavai1.ab1.e.Thismethodusesradioisotopesthatemitbetaraysanddetectorsthatmeasuretheintensityofthosebetaraysname1.ythebytheintensitythecoatingoftheofthebasisbetaThewi1.1.bebetweentwopossib1.eiftheatomicnumberofthecoatingmateria1.issufficient1.ydifferentfromthatofthesubstrate.Theinstrumentisca1.ibratedusingca1.ibrationstandardshavingthesamecoatingandsubstrateasthespecimenbeca1.cu1.atetheTheperunitareaoftheoftheIfthetestarehasuniformthethisofthebackscatteredraysisdirect1.yproportiona1.tothethickness.Thismethodcanbeusedthethinheavydensity.measurementuncertaintyof1.essthan10%ofthemeasuringva1.uesoverawiderangeofcoatingthicknessachieved6Destructivemethods6.1 Microscopica1.(optica1.)method,ISO1463anoptica1.microscope.thismethodismu1.tip1.e-beaminterferometryuncertainty3868munderreproducib1.econditions.comp1.ete1.ydisso1.vingfo11nedfromthesurfacecoatingwithoutHttackingofthesubstrate.ThemaskingthisareaSuitab1.emcthodparticu1.ar1.yCOatingS.measuringtheessentia1.1.yVery1.aboratoryopaquetechniqucCOaIingS.usefu1.not(sub-micron)coatings.6.3 Profi1.ometricmethod,ISO4518substrate.andstepformeddeterminedsurfacee1.ectronica1.1.ymeasuringandrecordingthemotiondrawnsty1.us.vai1.ab1.ecommercia1.instrumentsa1.1.owmeasurementstobemadeovertherange0,01mmto0,00002mm6.4 Scanninge1.ectronmicroscopemethod,ISO9220software.microscope.Themeasurementismadeonaca1.ibrateddigita1.imageprovidedbythe6.5 Disso1.utionmethods6.5.1 Cou1.ometricmethod,ISO21776.5.1.1 Genera1.consumedine1.ectro1.yteundersuitab1.econditions.ProvidcdarcaSvhencoatingsamp1.etheconnectedasanode©ISO2024-A1.1.rightsreservedInthismethod,coatingthicknessismeasuredonamagnifiedimageofacross-sectionofthecoatingusingThemeasurementuncertaintyofthismethodis1.essthan10%ofthethicknesssubjecttoaminimumerrorof0,8m.However,withcarefu1.preparationofthespecimenandtheapp1.icationofsuitab1.einstruments,6.2Fizeaucapab1.eofprovidingameasurementmethod,ISOof0,4Bybeforep1.ating,astepasma1.1.areaoftheofthecoatingtothatitssubstrate,orbyheightofanstepismeasuredwithamu1.tip1.e-beaminterferometer.Thisforvitreousename1.usefu1.forThismethodthicknessofathinmeta1.andItisformeasuringthethicknessofcoatingsonstandardsusedforca1.ibratingnondestructivetestinstruments,suchasbetabackscatterandX-rayspectrometryinstruments,especia1.1.yforstandardswithratherthinThismethodprovidesanabso1.utemeasureofthemicroscopicvertica1.surfacevariationrangingfrom0,002mto0,2m.Themeasurementuncertaintyis±0,001m.Bymaskingduringthecoatingprocessorbydisso1.vingasma1.1.areaofthecoatingwithoutattackingthethisstepitsisheightisfromthebyofthesubstratetothatofthecoating.Asty1.usisoftheacrossA1.ternative1.y,optica1.profi1.ometerssuchasconfoca1.microscopesorinterferencemicroscopescanbeusedtomeasurethestepheight(20nm).Themeasurementuncertaintyofthismethodis1.essthan10%ofthethickness.Inthismethod,coatingthicknessismeasuredonamagnifiedimageofacross-sectionofthecoatingusingaSEM,sscanninge1.ectronThemeasurementuncertaintyis1.essthan10%ofthethicknessor0,1m1.whicheveristhegreater.Themassp