重离子辐照GaN.ppt

重离子辐照GaN,亿漫败订颈蕾纂唁丝吧则贵畅武赞枉帆星卒宵孪翰伶铡俗鲁篡渠孔憎由躲重离子辐照GaN重离子辐照GaN,Page 2,能量为500keV剂量为51014/cm2的Au+辐照GaN及退火的X射线衍射分析图,廖框叭亡磨秩圈晾剁崩酚现棚鼻洋长颊往涧赘颜失拾靠底苇匡碰祟奖烤厕重离子辐照GaN重离子辐照GaN,Page 3,能量为500keV剂量为51015/cm2的Au+辐照GaN及退火的X射线衍射分析图,著触夹砖侮密义悦龄汗代赏鳖貉晚佑芒翠擦败青举锦丙渣瓦表拧卉跋雇菌重离子辐照GaN重离子辐照GaN,Page 4,Au辐照GaN的RBS/C研究,扎叼瘸吉誊噬扦淡霞辱车绵芦辽夹楷既似筒句受涨但栏敏贴屹意峦肯误洗重离子辐照GaN重离子辐照GaN,Page 5,Transport of Ions in Matter,E,Z1,E2,Z2,E1,Z1,1.If E2Edisp,then Atomic Displacement.2.If E1Edisp,E2Edisp,then Vacancy;If E2Edisp,Z1=Z2,then Replacement Collision,E1 is released as Phonons;If Z1Z2,then Z1 becomes a stopped Interstitial Atom.4.If E1Edisp,E2Edisp,then Z1 becomes an interstitial Atom and E1+E2 is released as phonons.,Assume:Incident atom has atomic number Z1,energy E.collision within the target with an atom of atomic number Z2.After the collision,the incident ion has energy E1 and the struck atom has energy E2.,乖窗藉抠蒸乘骇怕瞬丈惺轰啤蘸旭蛛焰顿肮澡莫包娜疗闸凶章侩黄攘蝎烯重离子辐照GaN重离子辐照GaN,Page 6,Transport of Ions in Matter,Displacements=Vacancies+Replacement CollisionsVacancies+Replacement=Interstitials+(Atoms which leave the target volume),入射粒子产生级联碰撞的示意图,战纫曾旧话糟梁腑埔茧蹦严侥假收制荐贝婿芒誓奸菱劲吠魏晓痹芦芬如箱重离子辐照GaN重离子辐照GaN,