ANSIESD S20.202021 中英文对照版.docx
ANSI/ESDS20.20:2021中英文对照版FOREWORD前言Thisstandardcoverstherequirementsnecessarytoestablish,implement,andmaintainanelectrostaticdischarge(ESD)controlprogramforactivitiesthatmanufacture,process,assemble,install,transport,package,label,service,test,inspect,orotherwisehandleelectricalorelectronicparts,assemblies,andequipmentsusceptibletodamagebyelectrostaticdischargesgreaterthanorequalto100voltshumanbodymodel(HBM)and200voltschargeddevicemodel(CDM).TheCDMvoltagelevelusedinthisdocumentisbasedonmanagingprocessessentialinsulatorstomitigatefield-inducedvoltagesondevicesthatcouldleadtodamage.本标准涵盖了建立、实施和维护静电放电(ESD)控制程序的必要要求,这些控制程序用于制造、加工、组装、安装、运输、包装、标签、服务、测试、检杳或以其他方式处理电气或电子部件、组件、以及易受大于或等于100伏特的人体模型(HBM)和200伏特的充电设备模型(CDM)搅坏的设备。本文档中使用的CDM电压级别是基于对工艺必要绝缘体的管理,以减轻可能导致损坏的设备上的场感应电压。Thisstandardalsodefinestherequirementsforisolatedconductors.Thereferencetomachinemodel(MM)isretainedinthisstandardforthehistoricalassociationtotheMMrobustnessofdevicestoisolatedCondUCtors.本标准还规定了孤立导体的要求。本标准保留了机器模型(MM)的软喷料,以说明设备对孤立导体的MM持续稳定性的历史关联。HBMandCDMfullycharacterizetheESDrobustnessofdevices.Therefore,MMtestingisnolongerrequiredtoqualifydevices,andtestdatamaynotbeavailable.HBM和CDM充分表征了器件的ESD稳定性。因此,Mv测试不再需要用设备验证,和测试数据可能不需要在使用。ThisdocumentcoverstheESDcontrolprogramrequirementsforestablishingaprogramtohandleESDsensitive(ESDS)itemsbasedonthehistoricalexperienceofbothmilitaryandcommercialorganizations.ReferencesincludeEOS/ESDAssociation,U.S.Military,andANSIapprovedstandardsformaterialpropertiesandtestmethods.ThefundamentalESDcontrolprinciplesthatformthebasisofthisdocumentare:本标准根据军队和商业机构的历史经验,涵盖了建立ESD敏感(ESDS)项目处理程序的ESD控制程序要求。参考资料包括EOS/ESD协会,美国军事,ANSI批准的材料性能和测试方法标准。构成本文件域础的ESD基本控制原则如下:A. Allconductorsintheenvironment,includingpersonnel,shallbebondedorelectricallyconnectedandattachedtoaknowngroundorcontrivedground(asonshipboardoraircraft).Thisattachmentcreatesanequipotentialbalancebetweenallitemsandpersonnel.Electrostaticprotectioncanbemaintainedatapotentialabovea"zero"voltagegroundpotentialifallitemsinthesystemareattheSamePotential所有在管控环境里的导体,包括人员,必须直接连接或链接到厂房设计接地系统或非传统接地系统(如在船上或太空船上),使上述物件和人员处于等电位状态。只要系统里所有物件处于等电位状态,即便对地电位水平不是零伏特,该静电防护系统依然能达到应有效果。B. Processessentialinsulatorsintheenvironmentcannotlosetheirelectrostaticchargebyattachmenttoground.Ionizationsystemsprovideneutralizationofchargeontheseprocessessentialinsulators(circuitboardmaterialsandsomedevicepackagesareexamplesofnecessaryinsulators).AssessmentoftheESDhazardcreatedbyelectrostaticchargeontheprocessessentialinsulatorsintheworkplaceisrequiredtoensurethatappropriateactionsareimplemented,commensuratewiththerisktoESDSitems.系统里不可排除的非导体,即制程中必需用到的绝缘体(如线路板和芯片封装材料等),不能通过接地起到静电防护作用,此时需兼离子静电消除器中和部分绝缘体的静电荷。因此,对区域内每个必用绝缘体进行风险评估是必须的,以便对ESDS物品IT针对性的选择合理的铮电防护措施。C. TransportationofESDSitemsnecessitatesenclosuresinprotectivematerials,althoughthetypeofmaterialdependsonthesituationanddestination.Whilethesematerialsarenotdiscussedinthedocument,itisimportanttorecognizethedifferencesinapplications.Formoreclarification,seeANSI/ESDS541.运送ESDS物品至EP(ESD防护区)外时必须使用静电防护包装材料,但该包装材料需依据应用情况和目的地而合理选择。在EPA内,抗静电和耗散性包装材料也许可提供足够的防护,但在EPA夕卜,建议使用抗静电和静电屏蔽包装材料。虽然本文没具体描述这些材料,但对它们在应用上的差异需有充分地识别。有关详细信息可参见ANSI/ESDS54kAnyrelativemotionandphysicalseparationofmaterialsorflowofsolids,liquids,orparticle-ladengasescangenerateanelectrostaticcharge.Commonsourcesofelectrostaticchargeincludepersonnel,itemsmadefromcommonpolymericmaterials,andprocessingequipment.ESDdamagecanoccurinseveralWaYS,including:任何固体,液体或含颗粒的气体间的摩擦或者分离都会产生静电。比较常见的ESD赦源于操作人员,一般的高分子材料和生产加工设备。ESD引起的破坏可由多种方式产生,包括:1) Achargedobject(includingaperson)comingintocontactwithanESDSitem.带电物体(如人体)接触ESDS物品。2) AchargedESDSitemmakingcontactwithgroundoranotherconductiveobjectatadifferentpotential.带电的ESDS物品与接地歌或处于不同电位的导体接触。3) AnESDSitemmakingcontactwithgroundoranotherconductiveobjectwhileexposedtoanelectrostaticfield.对暴露于静电电场的ESDS物品接地。ExamplesofESDSitemsinclude,butarenotlimitedto,microcircuits,discretesemiconductors,thickandthinfilmresistors,hybriddevices,printedcircuitboards,andpiezoelectriccrystals.ItispossibletodeterminedeviceanditemsusceptibilitybyexposingtheitemtosimulatedESDevents.Thelevelofsensitivity,determinedbytestingusingsimulatedESDevents,maynotnecessarilyrelatetothelevelofsensitivityinareal-lifesituation.However,thesensitivitylevelsareusedtoestablishabaselineofsusceptibilitydatatocomparedeviceswithequivalentpartnumbersfromdifferentmanufacturers.Twodifferentmodelsareusedforthecharacterizationofelectronicitems:HBMandCDM.微电路、分立的半导体器件、厚膜和薄膜电阻、混合型装置、印刷线路板及压电晶体等,都属于ESDS物品。这些物品的ESD敏感度可通过一些模拟的静电放电模型来确定。虽说模拟测试并不一定能完全代表实际应用情况,但这些模拟测试得来的数据可用于对同类产品性能的比较。用于定义电子元器件敏感度的两个放电模型是HBM和CDM,Formoreinformationontherequirementsinthisstandard,thereisatechnicalreport,ESDTR2O.2O-ESDAssociationTechnicalReport-HandbookfortheDevelopmentofanElectrostaticDischargeControlProgramfortheProtectionofElectronicParts,Assemblies,andEquipment.Compliancewiththisstandardcanbedemonstratedthroughthird-partycertification.ThecertificationprocessislikeanyqualitymanagementsystemcertificationsuchasISO9001.InformationonthecertificationprocesscanbeobtainedbycontactinganEOS/ESDAssociation,Inc.approvedcertificationbody.ForalistofEOS/ESDAssociation,Inc.approvedcertificationbodies,seeWWWesda.org.就如ISO9001一样,本标准也能通过第三方的认证。相关的认证程序和信息可向ESD协会指定的认证单位咨询。有关ESD协会指定海IYl位的名单,详见ESD协会官方网站ww.esda.orgThisStandardlwasoriginallydesignatedANSI/ESDS20.20-1999andwasapprovedonAugust4,1999.ANSI/ESDS20.20-2007wasarevisionofANSI/ESDS20.20-1999andwasapprovedonFebruaryllt2007.ANSIESDS20.20-2014isarevisionofANSI/ESDS20.20-2007andwasapprovedonMarch2St2016.ANSI/ESDS20.20-2021isarevisionofANSIESDS20.20-2014andwasapprovedonOctober28,2021.本标准(1)的首版为ANSI/ESDS20.20-1999并于1999年8月4日发布。ANSI/ESDS20.20-2007是ANSI/ESDS20.20-1999的修订版本并于2007年2月11日发布。ANSI/ESDS20.20-2014是ANSI/ESDS20.20-2007的修订版本并于2014年6月11日发ANSI/ESDS20.20-2021是ANSI/ESDS20.20-2021的修订版本并于2021年10月28日获批。TABLEOFCONTENTS目录1.0PURPOSE目的12.0SCoPE范围13.0REFERENCEDPUBLICATIONS参考出版物14.0DEFINITIONS定义25.0PERSONNELSAFETY人员安全26.0ESDCONTROLPROGRAM静电控制方案26.1 ESDCONTROLPROGRAMREQUIREMENTS静电控制方案要求26.2 ESDCONTROLPROGRAMMANAGERORCOORDINATOR静电控制方案之经理或协调员36.3 TAlLoRING修正37.0ESDCONTROLPROGRAMADMINISTRATIVEREQUIREMENTS静电控制方案之行政要求37.1 ESDCONTROLPROGRAMPLAN静电控制方案计划37.2 TRAININGPLAN培训方案37.3 PRODUCTQUALIFICATIONPLAN产品认证计划37.4 COMPLIANCEVERIFICATIONPSN.符合性验证计划48.0ESDCONTROLPROGRAMPLANTECHNICALREQUIREMENTS静电控制方案之技术要求48.1 Groundingzequipotentialbondingsystems接地/等电位系统48.2 PERSONNELGROUNDING人员接地58.3 ESDProtectedareas(EPAS)静电保护区68.3.1 Insulators绝缘体68.3.2 ISoIatedCOndUCtOrS孤立导体78.4 PACKAGlNG包装108.4.1 UnitedStatesDepartmentofDefense(DoD)PackagingRequirements美国国防部(DOD)包装要求108.5 MARKING标记10Annexes附录Annex A (Informative):AdditionalProcessConsiderations额外关注过程11Annex B (Informative):ESDSensitivityTesting静电敏感元器件测试12Annex C (Informative):Tailoring删I减说明14Annex D (Informative):RelatedDocuments相关文件16Annex E (Informative):StatementofDirection声明指引18AnnexF(Informative):RevisionHistoryforANSI/ESDS20.20ANSI/ESDS2O.2O修订历史19TableS附表Table 1: Grounding/EquipotentialBondingRequirements接地及等电位连接要求5Table 2: PersonnelGroundingRequirement人员接地之要求5Table 3: EPAESDeOntroIItemS静电防护区管控项目8Table 4: PackagingRequirements包装材料要求10Table 5: ESDSusceptibilityTestReferencesforDevices防静电器件敏感度测试参考13ESDAssociationStandardfortheDevelopmentofanElectrostaticDischargeControlProgramforProtectionofElectricalandElectronicParts,Assemblies,andEquipment(ExcludingElectricallyInitiatedExplosiveDeViCeS)关于规划对电气和电子部件、组件和设备(不包括电气引爆装宜)实施静电防护的ESD管控体系的ESD协会标准1.0PURPOSE目的Thepurposeofthisstandardistoprovideadministrativeandtechnicalrequirementsforestablishing,implementing,andmaintaininganESDcontrolprogram(hereafterreferredtOaSthe"Program").本标准的目的是明确规划、实施和维护ESD管控体系的行政和技术上的要求。2.0SCOPE范围Thisdocumentappliestoorganizationsthatmanufacture,process,assemble,install,package,label,service,test,inspect,transport,orotherwisehandleelectricalorelectronicparts,assemblies,andequipmentsusceptibletodamagebyelectrostaticdischargesgreaterthanorequalto100voltshumanbodymodel(HBM)and200voltschargeddevicemodel(CDM).Also,protectionfromisolatedconductorsishandledbylimitingthevoltageonisolatedconductorstolessthan35volts.Processesthatincludeitemssusceptibletolowerwithstandvoltagesmayrequireadditionalcontrolelementsoradjustedlimits.ProcessesdesignedtohandleitemswithalowerESDwithstandvoltagecanstillclaimcompliancetothisstandard.Thisdocumentdoesnotapplytoelectricallyinitiatedexplosivedevices,flammableliquids,orPoWderS.本标准适用的领域包括:生产、加工、装配、安装、包装、标记、检修、测试、检查、运输或处置HBY敏感度大于或等于100伏,CDM敏感度大于或等于200伏以及对孤立导体放电敏感度大于或等于35伏的电气或电子部件、组件和设备。当涉及敏感度等级要求更加严格的装置时露考虑额外防护措施或提高管控标准,但这并不等于已违反规定,仍视为符合本标准要求。本标准不适用于电气引爆装SL易燃液体和粉末。NOTE:TheCDMvoltagelevelusedinthisdocumentisbasedonindustryexperiencewhenmanagingprocessessentialinsulatorstomitigateinducedvoltagesondevicesthatcouldleadtodamage.本标准的CDM管控水平是基于有效管控制程中必用绝缘材料所引起的对ESDS物有破坏性的感应电场3.0REFERENCEDPUBLICATIONS规范性引用文件Unlessotherwisespecified,thefollowingdocumentsofthelatestissue,revision,oramendmentformapartofthisstandardtotheextentspecifiedherein:凡是不注目期的引用文件,其最新版本(包括修订版本)适用于本标准。ESDADV1.0zESDAssociation'sGlossaryofTerms协会专用术语ANSI/ESDSl.l,WristStraps静电手腕带ANSI/ESDSTM2.1,Garments-ResistiveCharacterization静电控制工作服ANSI/ESDSTM3.1,Ionization离子静电消除器ANSI/ESDSP3.3,PeriodicVerificationofAirIonizers离子部电消除器之定期检测ANSI/ESDSTM4.1,Worksurfaces-ResistanceMeasurements工作表面之电阻测量ANSI/ESDS6.1,Grounding接地系统ANSI/ESDSTM7.1,FlooringSystems-ResistiveCharacterization地板之材料特性ANSI/ESDSTM9.1,Footwear-ResistiveCharacterization鞋具之电阻特性ANSI/ESDSP9.2,FootGrounders-ResistiveCharacterization鞋具-导电鞋带之电阻特性ANSI/ESDSTMll.11,SurfaceResistanceMeasurementofStaticDissipativePlanarMaterials平面耗散材料的表面电阻测量ANSI/ESDSTMll.12,VolumeResistanceMeasurementsofStaticDissipativePlanarMaterials平面耗散材料的体积电阻测量ANSI/ESDSTM11.13zTwo-PointResistanceMeasurement两点之间电阻测量ANSI/ESDSTM11.31,Bags屏蔽袋ANSI/ESDSTM12.1,Seating-ResistanceMeasurements座椅之电阻测量ANSI/ESDS13.1,ElectricalSoIderingZDesoIderingHandTools电焊/电拆焊工具ESDTR53,ComplianceVerificationofESDProtectiveEquipmentandMaterialsESD控制物品和材料的符合性验证ANSI/ESDSTM97.1,Footwear/FlooringSystem-ResistanceMeasurementinCombinationwithaPerson地板/鞋具/人员系统的电阻测量ANSI/ESDSTM97.2,Footwear/FlooringSystem-VoltageMeasurementinCombinationwithaPerso2地板-鞋具-人员组合系统的电压测量ANSI/ESDS541,PackagingMaterialsESDS物品之包装材料MIL-STD-2073-1,DepartmentofDefenseStandardPracticeforMilitaryPackaging美国国防部军用包装标准标准4.1 DEFINITIONS½5tThetermsusedinthebodyofthisdocumentareinaccordancewiththedefinitionsfoundinESDADV1.0,ESDAssociation'sGlossaryofTerms,availableforcomplimentarydownloadatwww.esda.org.Forthepurposesofthisstandard,thefollowingdefinitionsapply:ConductoriAmaterialthatmeasureslessthan1.0XIO4ohmspointtopoint.ESDcontrolitems:Alltheitems,materials,devices,tools,andequipmentusedwithinanEPAforthecontrolofstaticelectricity.(SeealsoESDtechnicaIelements).lnsulator:Anymaterialthatmeasuresgreaterthanorequalto1.0×1011ohmsbyANSI/ESDSTMll.11,ANSI/ESDSTMll.12,orANSI/ESDSTM11.13.isolatedconductor:Aconductorthatmeasuresgreaterthanorequalto1.0xIO9ohmsfromthecontactpoint(wheretheESDSitemwillbecontacted)toground.unprotectedESDSitem.AnyESDSitemwithoutESDprotectivepackagingorcoverings.Work-surface.AnysurfacewhereanytypeofworkorprocessingisperformedonanunprotectedESDSitem.本文件中所使用的术语及定义的参考标准为ESDADVLOESDAssociation'sGlossaryofTerms。该ESDADVl.0文件可从ww.esda.org免费下载。Conductor导体:点到点测量电阻小于1*10'Q的材料。ESD控制项目:静电防护区内适用所有的静电控制项目,如:材料,设备,工具和设备。绝缘体:按照ANSl/ESDSTMlL11,ANSI/ESDSTMll.12,ANSI/ESDSTmLI3,测量阻值大于或等于1*10UC的材料。孤立导体:ESDS的接触位置到地之间的阻值大于l*109Q的导体.不受管控的ESDS项目:不需要静电防护材料保护的ESDS项目。工作台面:用于操作ESDS项目的各种类型的表面。4.2 PERSONNELSAFETY人员安全THEPROCEDURESANDEQUIPMENTDESCRIBEDINTHISDOCUMENTMAYEXPOSEPERSONNELTOHAZARDOUSELECTRICALCONDITIONS.USERSOFTHISDOCUMENTARERESPONSIBLEFORSELECTINGEQUIPMENTTHATCOMPLIESWITHAPPLICABLELAWS,REGULATORYCODES,ANDBOTHEXTERNALANDINTERNALPOLICY.USERSARECAUTIONEDTHATTHISDOCUMENTCANNOTREPLACEORSUPERSEDEANYREQUIREMENTSFORPERSONNELSAFETY.GROUNDFAULTCIRCUITINTERRUPTERS(GFCI)ANDOTHERSAFETYPROTECTIONSHOULDBECONSIDEREDWHEREVERPERSONNELMIGHTCOMEINTOCONTACTWITHELECTRICALSOURCES.ELECTRICALHAZARDREDUCTIONPRACTICESSHOULDBEEXERCISED,ANDPROPERGROUNDINGINSTRUCTIONSFOREQUIPMENTSHALLBEFOLLOWED.THERESISTANCEMEASUREMENTSOBTAINEDTHROUGHTHEUSEOFTHESETESTMETHODSSHALLNOTBEUSEDTODETERMINETHERELATIVESAFETYOFPERSONNELEXPOSEDTOHIGHACORDCVOLTAGES.本标准阐述的某些操作步骤和设备使用可能导致操作人员暴露于有害电气条件中。本标准的用户必须负责选择使用所有相关法律、法规和内外政策所规定的防护程序和措施。特别提醒用户:本标准不能替代或畤越任何操作人员必须采取的安全防护措施,所有涉及有源电源的操作应采用接地故障断路器(GFCI)和其它安全保护措施,槌用户实施防范电气危害的操作,并遵循正确的设备接地要求。通过实施本标准得到的电阻测试值,不能作为评估高电流、高电压操作风险的依据。(备注:与2014版本无变化,但是2021版字体加粗,特意做强调)4.3 ESDCONTROLPROGRAMESD控制项目4.4 ESDControlProgramRequirementsTheProgramshallincludebothadministrativeandtechnicalrequirementsasdescribedherein.TheProgramshalldocumentthelowestlevel(s)ofdeviceESDsensitivitythatcanbehandled.TheOrganizationshallestablish,document,implement,maintain,andverifythecomplianceoftheProgrampertherequirementsofthisdocument.ESD管控体系应包涵本标准所规定的行政和技术要求。体系文件必须明确注明所制定ES管控体系可提供防护的最低的各ESD敏感度等级执行单位应制定、记录归档、实施、维护并定期险i正其ESD管控体系与本标准的符合性。4.5 ESDControlProgramManagerorCoordinatorESD管控体系专员TheOrganizationshallassignanESDcontrolprogrammanagerorcoordinatortoverifythecomplianceoftheProgrampertherequirementsofthiSdoCUment.执行单位必须委任一位专员负贲跟进所制定ESD管控体系与本标准实施情况的符合性.4.6 Tailoring适用性调整Thisdocument,orportionsthereof,maynotapplytoallESDcontrolprograms.Anydeviationfrom,orexclusionof,arequirementofthisdocumentisconsideredtailoring.TailoredrequirementsshallbesummarizedintheESDcontrolprogramplanandincludethejustificationandtechnicalrationaleforthedeviationorexclusionoftherequirementfromtheplan.SeeAnnexCformoreinformation.本标准的部分要求可能在某些领域需作适当调整。但这些调整需建立在对标准相关规定要求的适用性已进行评估的基础上。对于该规定要求的删减或假决定,要有技术理论和实际验证依据,并将这些依据归档于ESD管控体系手册中。7.1 ESDCONTROLPROGRAMADMINISTRATIVEREQUIREMENTSESD管控体系要求7.1 ESDControlProgramPlanESD控制程序计划TheOrganizationshallprepareanESDcontrolprogramplanthataddresseseachoftherequirementsoftheProgram.Thoserequirementsinclude:组织需将所制定的ESD管控体系形成文件记录,并确保该手册涵盖以下内容: Training人员培训,ProductqualificationESD控制物品导入计划,ComplianceverificationESD控制措施符合性验证计划,Grounding/equipotentialbondingsystems接地/等电位连接系统,Personnelgrounding人员接地,ESDprotectedarea(EPA)requirementsepa(esd防护区)要求 Packaging防护包装 Marking标识TheESDcontrolprogramplanistheprincipaldocumentforimplementingandverifyingtheProgram.TheNoalisafullyimplementedandintegratedPro2ramthatConfcIrmStointernalqualitySVStemrequirements.TheESDcontrolprogramplanshallidentifytheareaswithintheOrganizationthatareapartoftheoverallESDcontrolprogram.ESD管控程序计划是用于实施和骁证体系工作的主要文件。本标准H标应是与内部质量:体系全面实施和整合为一体。该ESD管控体系手册需适用于执行版位内各个运作环节。7.2 TrainingPlan人员培训计划AtrainingplanshallbeestablishedtoensureallpersonnelwhohandleorotherwisecomeincontactwithanyESDSitemsareprovidedwithinitialandrecurrentESDawarenessandPreVentionraini11R.InitialtrainingshallbeprovidedbeforepersonnelhandleESDSitems.ThetypeandfrequencyofESDtrainingforpersonnelshallbedefinedinthetrainingplan.Thetrainingplanshalli