第14章微流控芯片.ppt
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1、第1-4章 微流控芯片,目 录,发展背景制备技术流体控制典型实例商品简介,目 录,发展背景制备技术流体控制典型实例商品简介,Do you know?,Biochip生物芯片Lab-on-a-Chip 芯片实验室LabchipMicrofluidic Chip 微流控芯片Micro Total Analysis System(MicroTAS,TAS)微全分析系统,Research into miniaturization is primarily driven by the need to reduce costs by reducing the consumption of expensiv
2、e reagents and by increasing throughput and automation.For example,most are aware of the increasing cost of health care,driven in part by the cost of implementing the latest diagnostic assays.These assays,which are usually performed in microtiter plates that consume hundreds of microliters of reagen
3、ts,would benefit from the use of microfabricated arrays of nanoliter volume vials.By reducing reagent consumption by a factor of 103104,these devices could provide dramatic savings for the repetitive assays often performed in diagnostic laboratories.,Why miniaturization?,Anal.Chem.2000,72,330A-335A,
4、In the same way that integrated circuits allowed for the miniaturization of computers from the size of a room to the size of a notebook,miniaturization has the potential to shrink a room full of instruments into a compact lab-on-a-chip.,Anal.Chem.2000,72,330A-335A,尺寸效应(cm100m)尺寸1/100分子扩散时间1/10,000(1
5、h0.36s)体积1/1,000,000试剂用量1t1g,mlnl传热速度1500oC/s由此将带来:方法上的变革理论上的突破还有巨大的经济和社会效益,微流控分析芯片,微流控分析芯片目的是通过化学分析设备的微型化与集成化,最大限度地把分析实验室的功能转移到便携的芯片中。微流控分析芯片通过微机电加工技术把整个实验室的功能,包括采样、稀释、加试剂、反应、分离、检测等集成在几平方厘米的微流控芯片上,且可多次使用,因而极大地减少了样品和分析试剂的用量,降低了分析的成本,加快了分析的速度,具有广泛的适用性。,The Early Days:1975-1989,The first analytical mi
6、niaturized deviceA gas chromatographic air analyzer fabricated on a silicon wafer Terry,S.C.Ph.D.Thesis,Stanford,Stanford,CA,1975Terry,Stephen C.;et al.IEEE Transactions on Electron Devices,1979,ED-26(12),1880A miniature gas anal.system based on the principles of gas chromatog.The major components a
7、re fabricated in Si using photolithog.and chem.etching techniques,which allows size redns.of nearly 3 orders of magnitude compared to conventional laboratory instruments.consists of a sample injection valve,a 1.5-m-long capillary column.A thermal conductivity detector fabricated on a separate silico
8、n wafer.sepns.of gaseous hydrocarbon mixts.are performed in 10 s.,发 展 历 史,Photograph of a gas chromatograph integrated on a planar silicon wafer fabricated by Terry and co-workers at Stanford University.,However,the response of the scientific community to this first silicon chip device was virtually
9、 none,presumably because of the lack of technological experience(of the separation scientists)to deal with this kind of device.the research work related to miniaturization on silicon focused on the fabrication of components such as micropumps,microvalves,and chemical sensors.,The Renaissance:1990-19
10、93,the reemergence of silicon-based analyzersDesign of an open-tubular column liquid chromatograph using silicon chip technologyManz,A.;et al.Sensors and Actuators,B:Chemical(1990),B1(1-6),249 A novel concept of high pressure liquid chromatog.a silicon chip with an open-tubular column and a conducto
11、metric detector.A 55mm chip containing an open-tubular column of 6 m2m15cm was fabricated,which has theor.separation efficiencies of 8000 and 25,000 plates in 1 and 5 min,resp.The total column volume is 1.5 nL and the detection cell volume 1.2 pL.,Micrograph of Liquid Chromatograph chip manufactured
12、 by Manz and co-workers at Hitachi Ltd.,The concept of miniaturized total chemical analysis system or TAS was proposed by Manz et al.the main reason for miniaturization was therefore to enhance the analytical performance of the device rather than to reduce its size.it was also recognized that a smal
13、l size presented the advantage of a smaller consumption of carrier,reagent,and mobile phase.,Growing to Critical Mass:1994-1997,In 1994,the number of published papers related to TAS increased abruptly since more research groups joined the efforts to develop the area.Microfabrication Design Separatio
14、ns Biochemical Reactors Detection,分类与特点,分类:材料:硅、玻璃、石英、聚合物、复合材料功能:分离、采样与前处理、检测、化学合成等特点:高效、低耗、集成、一致性好、昂贵,目 录,发展背景制备技术流体控制典型实例商品简介,微结构的形成1经典的光刻技术,Photolithograph procedures for making glass template.(a)Spine coating of photoresist,(b)covered with photo mask,(c)exposure,(d)developing,(e)etching,and(f)re
15、moval of photoresist.,适合硅、玻璃、石英等材料,与传统的半导体工业的方法一致。分为湿法和干法两种,干法的分辨率较湿法高,相应的制造成本也高。,Analyst,2004,129,305308,制备技术 之,微结构的形成2模版浇注法(模塑法),Process overview for mass manufacturing of plastic microfluidic systems,适合聚合物材料。大批量生产时成本低。,Anal.Chem.,2002,74,78A-86A,微结构的形成3模版热压法,Schematic representation of the fabric
16、ation method involving hotembossing of thermoplastic polymer pellets and thermal bonding.,适合热塑性聚合物。,Applied Physics Letters,2002,80,3614-3616,微结构的形成4激光刻蚀法,用激光直接在聚合物或玻璃上加热形成微结构.,Anal.Chem.,1997,69,2035-2042,Microfilter,Sensors and Actuators B 67 2000 203208,芯片的封装1热键合,对玻璃和石英材质刻蚀的微结构一般使用热键合方法,将加工好的基片和相
17、同材质的盖片洗净烘干对齐紧贴后平放在高温炉中,在基片和盖片上下方各放一块抛光过的石墨板,在上面的石墨板上再压一块重0.5kg的不锈钢块,在高温炉中加热键合。玻璃芯片键合时,高温炉升温速度为10oC/分,在620oC时保温3.5小时,再以10oC/分的速率降温。石英芯片键合温度高达1000oC以上。此方法对操作技术要求较高。,现代科学仪器,2001,4,8-12,制备技术 之,芯片的封装2阳极键合,在玻璃、石英与硅片的封接中已广泛采用阳极键合的方法。即在键合过程中,施加电场,使键合温度低于软化点温度。在500-760伏电场下,升温到500oC时,可使两块玻璃片键合。在两块玻璃板尚未键合时,板间空
18、气间隙承担了大部分电压降,玻璃板可视为平行板电容器,板间吸引力与电场强度的平方成正比,因此,键合从两块玻璃中那些最接近的点开始,下板中可移动的正电荷(主要是Na+)与上板中的负电荷中和,生成一层氧化物(正是这层过渡层,使两块玻璃板封接),该点完成键合后,周围的空气间隙相应变薄,电场力增大,从而键合扩散开来,直至整块密合。,现代科学仪器,2001,4,8-12,芯片的封装3室温键合,Anal.Chem.2004,76,5597-5602,芯片的封装4贴合 将聚合物薄片直接覆盖在玻璃或石英板上。5压合,Schematic illustration of sealing and connection
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